Mr. Jeong-Sik Kim Profile

Jeong-Sik Kim

Deputy General Manager at Dongjin Semichem Co Ltd

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Publications (2)

Proceedings Article | 23 March 2010 Paper

Measurement of EUV resists performances RLS by DUV light source

Jeongsik Kim, Jae-Woo Lee, Deogbae Kim, Jaehyun Kim

Proceedings Volume 7636, 76362Y (2010) https://doi.org/10.1117/12.846518

KEYWORDS: Diffusion, Polymers, Extreme ultraviolet lithography, Line width roughness, Extreme ultraviolet, Deep ultraviolet, Line edge roughness, Optical lithography, Semiconducting wafers, Chemically amplified resists

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Proceedings Article | 1 April 2009 Paper

Analysis of molecular resist distribution in a resist film by using x-ray reflectivity

Jeongsik Kim, Jae-Woo Lee, Deogbae Kim, Jaehyun Kim, Sung-Il Ahn, Wang-Cheol Zin

Proceedings Volume 7273, 72732W (2009) https://doi.org/10.1117/12.814449

KEYWORDS: X-rays, Reflectivity, Glasses, Line width roughness, Extreme ultraviolet lithography, Lithography, Extreme ultraviolet, Chemical analysis, Molecular interactions, Polymers

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