Dr. Jeong-yeol Jang Profile

Dr. Jeong-yeol Jang

at Dongbu HiTek Co Ltd

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Author

Publications (2)

Proceedings Article | 11 April 2006 Paper

Transistor fabrication for sub-90 nm transistor by using trim technology at ArF light source

Jin-Youp Kim, Jeong-Yeol Jang, Jae-Hee Kim, Keeho Kim

Proceedings Volume 6153, 61532Z (2006) https://doi.org/10.1117/12.657078

KEYWORDS: Etching, Photoresist materials, Line edge roughness, Lithography, Transistors, Photomasks, Process control, Silicon, Resistance, Optical lithography

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Proceedings Article | 10 May 2005 Paper

Scatterometry measurement method for gate CD control of sub-130nm technology

Jeongyeol Jang, Sungho Kwak, Karl Lee, Keeho Kim, Heongsu Park, James Youn, Lucas Sohn

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.601581

KEYWORDS: Critical dimension metrology, Scatterometry, Scanning electron microscopy, Semiconducting wafers, Process control, Etching, Metrology, Diffraction gratings, Scatter measurement, Lithography

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