Mr. Jeremy A. Walraven Profile

Jeremy A. Walraven

Senior Member Technical Staff at Sandia National Labs

SPIE Involvement:

Author

Proceedings Article | 5 February 2010 Paper

Stability experiments on MEMS aluminum nitride RF resonators

Shannon Crouch, James Ohlhausen, Danelle Tanner, Ted Parson, Roy Olsson, Jeremy Walraven

Proceedings Volume 7592, 759209 (2010) https://doi.org/10.1117/12.846551

KEYWORDS: Resonators, Semiconducting wafers, Aluminum nitride, Silicon, Microelectromechanical systems, Electrodes, Contamination, Aluminum, Network security, Sensors

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Proceedings Article | 22 January 2005 Paper

Damage of MEMS thermal actuators heated by laser irradiation

John Sackos, Leslie Phinney, Jeremy Walraven, Kelly Klody

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.594408

KEYWORDS: Actuators, Oxides, Microelectromechanical systems, Laser induced damage, Thermography, Optical fabrication, Laser irradiation, Silicon, Failure analysis, Target detection

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Proceedings Article | 22 January 2005 Paper

Backside preparation and failure analysis for packaged microelectromechanical systems (MEMS)

Nafiz Karabudak, Edward Cole, Alice Kilgo, Richard Morrison, Jeremy Walraven, David Barr, Richard Anderson, John Maciel

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.600794

KEYWORDS: Failure analysis, Microelectromechanical systems, Inspection, Silicon, Polishing, Epoxies, Electrical breakdown, Ceramics, Switches, Packaging

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Proceedings Article | 23 December 2003 Paper

Electrothermal actuator reliability studies

Jeremy Walraven, Michael Baker, Richard Plass

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.530936

KEYWORDS: Actuators, Thermal modeling, Reliability, Scanning electron microscopy, Silicon, Resistance, Photomicroscopy, Microelectromechanical systems, Modulation, Data modeling

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Proceedings Article | 16 January 2003 Paper

Failure analysis of a multi-degree-of-freedom spatial microstage

Jeremy Walraven, Bernhard Jokiel

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478207

KEYWORDS: Failure analysis, Actuators, Oxides, Tolerancing, Computer aided design, Microfabrication, Reliability, Silicon, Microelectromechanical systems, Optical alignment

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Proceedings Article | 16 January 2003 Paper

Anodic oxidation-induced delamination of the SUMMiT poly 0 to silicon nitride interface

Richard Plass, Jeremy Walraven, Danelle Tanner, Frederick Sexton

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.476366

KEYWORDS: Electrodes, Silicon, Interfaces, Oxides, Microelectromechanical systems, Humidity, Scanning electron microscopy, Photomicroscopy, Oxygen, Oxidation

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Proceedings Article | 2 October 2001 Paper

Characterization of an inchworm actuator fabricated by polysilicon surface micromachining

Jeremy Walraven, David Luck, James Redmond, Maarten de Boer

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.443009

KEYWORDS: Actuators, Coating, Electrodes, Silicon, Oxides, Moire patterns, Surface micromachining, Microelectromechanical systems, Atomic force microscopy, Calibration

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Proceedings Article | 2 October 2001 Paper

Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS)

Jeremy Walraven, Susan Hietala, Edward Cole, Christopher Dyck, Lynn Sloan, Chris Tigges

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.442999

KEYWORDS: Switches, Microelectromechanical systems, Metals, Failure analysis, Aluminum, Scanning electron microscopy, Gold, Gallium arsenide, Etching, Electrodes

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Proceedings Article | 10 August 2000 Paper

Electrostatic discharge/electrical overstress susceptibility in MEMS: a new failure mode

Danelle Tanner, Richard Anderson, Jerry Soden, Paiboon Tangyunyong, Jeremy Walraven, Lloyd Irwin, Edward Cole

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395703

KEYWORDS: Microelectromechanical systems, Actuators, Electrical breakdown, Scanning electron microscopy, Failure analysis, Amplifiers, Instrument modeling, Atomic force microscopy, Manufacturing, Thermal modeling

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Proceedings Article | 10 August 2000 Paper

Failure analysis of tungsten-coated polysilicon micromachined microengines

Michael Rye, Seethambal Mani, James Fleming, Jeremy Walraven, Norman Smith, Alejandro Pimentel, Danelle Tanner, Paul Kotula, Thomas Headley

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395708

KEYWORDS: Tungsten, Microelectromechanical systems, Scanning electron microscopy, Transmission electron microscopy, Failure analysis, Electrical breakdown, Silicon, Humidity, Atomic force microscopy, Surface roughness

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Proceedings Article | 18 August 1999 Paper

Failure analysis of worn surface-micromachined microengines

Thomas Headley, Jeremy Walraven, Danelle Tanner, Ann Campbell

Proceedings Volume 3880, (1999) https://doi.org/10.1117/12.359369

KEYWORDS: Humidity, Microelectromechanical systems, Failure analysis, Scanning electron microscopy, Transmission electron microscopy, Silicon, Diffraction, Nitrogen, Chemical analysis, Spectroscopy

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Showing 5 of 11 publications

Conference Committee Involvement (4)

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

25 January 2006 | San Jose, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

25 January 2005 | San Jose, California, United States

Reliability, Testing, and Characterization of MEMS/MOEMS III

26 January 2004 | San Jose, California, United States

Reliability, Testing, and Characterization of MEMS/MOEMS II

27 January 2003 | San Jose, CA, United States

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