Dr. Jerry D. Messman Profile

Dr. Jerry D. Messman

Managing Director at Stranaska LLC

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Proceedings Article | 8 August 2003 Paper

Overview of primary reference materials for molecular absorption spectrophotometry in the United States

Jerry Messman

Proceedings Volume 4826, (2003) https://doi.org/10.1117/12.514489

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Primary spectrophotometric Standard Reference Materials (SRMs) from the National Institute of Standards and Technology (NIST) are transfer artifact standards of the highest order in the United States. They are indispensable to spectrophotometer manufacturers for establishing instrument specifications and also to commercial spectrometrology companies for certified value assignment and benchmarking of secondary reference materials. When used judiciously, primary SRMs represent a pivotal link in the measurement traceability chain, and they facilitate quantitative assessment of measurement uncertainty for calibrations of metrological value. This paper provides a concise summary of the contemporary array of primary SRMs for molecular absorption spectrophotometry that can be used to leverage measurement accuracy and traceability to data and results for spectrophotometer operation within the spectral range 235 nm to 805 nm. An introductory benchmark traceability paradigm and a preliminary needs assessment for spectrophotometric SRMs are also presented.

Proceedings Article | 23 June 2000 Paper

Certified photometric standard for quality control and validation in UV/VIS analysis of lithographic resist materials and processes

Aron Shultz, Kathy McLain, Jerry Messman

Proceedings Volume 3999, (2000) https://doi.org/10.1117/12.388350

KEYWORDS: Transmittance, Optical filters, Spectrophotometry, Quartz, Standards development, Absorption, Lithography, Absorbance, Ultraviolet radiation, Calibration

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This paper describes a new certified reference material (CRM) intended specifically for independent benchmark validation and quality control of laboratory spectrophotometric measurements on lithographic research test materials. The photometric standard (CRM 500) is comprised of three individual neutral- density quartz filters having nominal percent transmittances of 10% T, 30% T and 90% T (nominal transmittance densities of 1.0, 0.5 and 0.04, respectively). The optical transmittance (T) and transmittance density (-log₁₀T) of each filter is certified at discrete spectral wavelengths corresponding to the exposure wavelengths at which optical steppers are operated. Applicable to deep ultraviolet (DUV) lithography, the CRM 500 standard is custom certifiable at spectral wavelengths down to 193 nm. The certified photometric values and their associated expanded uncertainties are provided at each wavelength. The photometric certification of each filter is benchmarked and traceable to a relevant standard (SRM^R 2031) from the National Institute of Standards and Technology (NIST). To ensure that the certified reference values at a given wavelength are accurate and valid at the time of the user measurement, the CRM 500 photometric standard must be recertified at appropriate intervals. A paradigm is presented for the open-loop photometric certification of the CRM 500 standard at ten custom wavelengths in the spectral range 193 nm to 700 nm.

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