CONFERENCE PROCEEDINGS
Advanced Search
Jian Rao
at Synopsys Inc
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 22 November 2023 Presentation
ML-model based curvilinear mask error correction
Linghui Wu, John Valadez, Jian Rao, Jim Burdorf, Yunqiang Zhang, Yongdong Wang, Alex Zepka, Folarin Latinwo
Proceedings Volume PC12751, PC1275109 (2023) https://doi.org/10.1117/12.2687654
KEYWORDS: Error control coding, Performance modeling, Resolution enhancement technologies, Printing, Optical proximity correction, Model-based design, Manufacturing, Extreme ultraviolet, Convection
Proceedings Article | 21 November 2023 Presentation + Paper
Curvilinear OPC mask synthesis flow
Proceedings Volume 12751, 127510T (2023) https://doi.org/10.1117/12.2686921
KEYWORDS: Optical proximity correction, Extreme ultraviolet
Proceedings Article | 16 March 2009 Paper
Pattern matching assisted modeling test pattern generation
Le Hong, Qiao Li, Jian Rao
Proceedings Volume 7274, 727429 (2009) https://doi.org/10.1117/12.814302
KEYWORDS: Scanning electron microscopy, Optical proximity correction, Databases, Calibration, Resolution enhancement technologies, SRAF, Process modeling, Image enhancement, Analytical research, Convolution
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top