This paper summarizes our recent progress on using 3D printing and laser micromachining methods to fabricate optical microsensors for various applications. Optical grade glasses are printed by 3D extrusion and laser sintering. High-precision and high surface quality optical structures of arbitrary shapes are obtained by ultrafast laser micromachining and CO2 laser resurfacing. Combining these advanced manufacturing methods, various optical structures and components can be made with flexible shape and desired accuracy. With unique advantages such as compact size, high thermal stability, and integrated optical functions, these 3D printed structures can be used as sensors for many applications.
In this paper, we report our recent research progresses on the design, fabrication and characterization of photonic sensors for harsh environment applications, with the help of novel Integrated Additive and Subtractive Manufacturing (IASM) system. Glass 3D printing with direct laser melting process in this IASM system presents the dimension accuracy on the order of tens or hundreds of microns. The addition of laser micromachining allows the fabrication of structures with micron dimension accuracy, showing the unique advantage of IASM system in high dimensional accuracy compared with traditional 3D printing process. A number of photonic sensors and devices will be summarized and presented, including (1) 3D printed all-glass fiber-optic pressure sensor for high temperature applications, (2) Information integrated glass module fabricated by IASM and (3) IASM for microfluidic pressure sensor fabrication.
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