Dr. Jiang Ji Profile

Dr. Jiang Ji

at Institute of Microelectronics

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Publications (2)

Proceedings Article | 15 January 2008 Paper

Near-field diffraction analysis and simulation about nanoscale of Fresnel zone plate

Ji Jang, Changqing Xie, Xiping Xu, Xiaoli Zhu, Ming Liu

Proceedings Volume 6832, 68321S (2008) https://doi.org/10.1117/12.755092

KEYWORDS: Diffraction, Zone plates, X-rays, Near field diffraction, X-ray diffraction, Computer simulations, X-ray astronomy, X-ray lithography, X-ray technology, Synchrotron x-ray imaging

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Proceedings Article | 4 January 2008 Paper

Fabrication of 200 nm period x-ray transmission gratings using electron beam lithography

Xiaoli Zhu, Changqing Xie, Tianchun Ye, Min Zhao, Jie Ma, Ji Jiang, Jiebin Niu, Ming Liu

Proceedings Volume 6832, 68320V (2008) https://doi.org/10.1117/12.758100

KEYWORDS: X-ray lithography, X-rays, Electron beam lithography, Gold, Electroplating, Polymethylmethacrylate, Photomasks, Silicon, X-ray telescopes, Photoresist processing

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