Dr. Jiantao Wang Profile

Dr. Jiantao Wang

at Shanghai Huali Integrated Circuit Corp

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Publications (1)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Lithography PR profile improvement and defects reduction by film pre-treatment

Jiantao Wang, Song Gao, Shuo Liu, Biqiu Liu, Xiaobo Guo, Cong Zhang, Jun Huang, Yu Zhang

Proceedings Volume 11611, 1161134 (2021) https://doi.org/10.1117/12.2583833

KEYWORDS: Lithography, Reflectivity, Scanning electron microscopy, Silicon, Photoresist materials, Line width roughness, Semiconducting wafers, Etching, Coating

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