Dr. Jie Ma
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 12 January 2009 Paper
Proc. SPIE. 7133, Fifth International Symposium on Instrumentation Science and Technology

Proceedings Article | 4 January 2008 Paper
Proc. SPIE. 6832, Holography and Diffractive Optics III
KEYWORDS: X-ray lithography, X-rays, Electron beam lithography, Gold, Electroplating, Polymethylmethacrylate, Photomasks, Silicon, X-ray telescopes, Photoresist processing

Proceedings Article | 21 November 2007 Paper
Proc. SPIE. 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography
KEYWORDS: Photomasks, X-ray lithography, Semiconducting wafers, X-rays, Gold, Beam propagation method, Optical design, Wave propagation, Light wave propagation, Lithography

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