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Dr. Jiin-Hong Lin
Principal Engineer at Taiwan Semiconductor Manufacturing Co Ltd
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Publications (1)
Proceedings Article | 14 October 2011 Paper
Productivity of femtosecond DUV laser photomask repair in a real world mask house
Jin-Hong Lin, C. Chen, F. G. Tsai, Tod Robinson, Daniel Yi, Jeff LeClaire, Roy White, Ron Bozak, Mike Archuletta
Proceedings Volume 8166, 81662X (2011) https://doi.org/10.1117/12.898502
KEYWORDS: Photomasks, Deep ultraviolet, Opacity, Pellicles, Femtosecond phenomena, Quartz, Image transmission, Critical dimension metrology, Manufacturing, Chromium
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