Prof. Jin-Baek Kim
at KAIST
SPIE Involvement:
Author
Publications (23)

Proceedings Article | 2 May 2008 Paper
Proc. SPIE. 6792, 24th European Mask and Lithography Conference
KEYWORDS: Etching, Polymers, Image processing, Silicon, Oxygen, Plasma etching, Line edge roughness, Reactive ion etching, Photoresist processing, Plasma

Proceedings Article | 12 April 2007 Paper
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Proteins, Optical lithography, Polymers, Glasses, Ultraviolet radiation, Chemistry, Photoresist materials, Tissue engineering, Photoresist processing

Proceedings Article | 2 April 2007 Paper
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Deep ultraviolet, Etching, Polymers, Ultraviolet radiation, Diffusion, Resistance, Lamps, Printing, Absorbance

Proceedings Article | 7 March 2007 Paper
Proc. SPIE. 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
KEYWORDS: Nanotechnology, Diffraction, Mirrors, Polymers, Molecules, Laser development, Single mode fibers, Picosecond phenomena, Nanolithography, Absorption

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, FT-IR spectroscopy, Deep ultraviolet, Etching, Polymers, Lamps, Printing, Polymerization, Photoresist processing, Absorption

Showing 5 of 23 publications
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