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Jin-Liang Chen
at Industrial Technology Research Institute
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Publications (4)
Proceedings Article | 17 June 2009 Paper
Auto-focusing in the scanning white-light interferometer
Proceedings Volume 7389, 73892S (2009) https://doi.org/10.1117/12.827456
KEYWORDS: Inspection, Interferometers, Optical inspection, Actuators, Charge-coupled devices, Light sources, Beam splitters, Ferroelectric materials, Sensors, Algorithm development
Proceedings Article | 15 September 2008 Paper
Large-scale 3-D profilometer
Proceedings Volume 7073, 70732J (2008) https://doi.org/10.1117/12.803008
KEYWORDS: Beam splitters, Interferometers, 3D metrology, Profilometers, 3D image processing, 3D image reconstruction, Light sources, Inspection, Objectives, Mirrors
Proceedings Article | 11 September 2007 Paper
Auto-scanning white-light interferometer
Proceedings Volume 6672, 667204 (2007) https://doi.org/10.1117/12.733625
KEYWORDS: Beam splitters, Interferometers, Interferometry, Calibration, Charge-coupled devices, Light sources, Actuators, Image processing, 3D metrology, LCDs
Proceedings Article | 12 October 2006 Paper
Dynamic out-of-plane profilometry for nanoscale full field characterization of MEMS with automatic detection of vibratory modes and MHz-scale measurement bandwidth
Liang-Chia Chen, Huang-Wen Lai, Calvin Chang, Yao-Ting Huang, Jin-Liang Chen
Proceedings Volume 6382, 63820N (2006) https://doi.org/10.1117/12.685976
KEYWORDS: Interferometry, Light emitting diodes, Microelectromechanical systems, Atomic force microscopy, Image deconvolution, Ferroelectric materials, Signal detection, Deconvolution, Charge-coupled devices, Algorithm development
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