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Jin-Young Kim
at Inje Univ
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Publications (2)
Proceedings Article | 14 September 2001 Paper
Photoresist thickness variation due to local and global topography
Jin-Young Kim, Heungin Bak, Young-Soo Sohn, Ilsin An, Kyoung-Yoon Bang, Hye-Keun Oh, Woo-Sung Han
Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435798
KEYWORDS: Coating, Photoresist materials, Semiconducting wafers, Critical dimension metrology, Liquids, Chlorine, Thin film coatings, Thin films, Polymers, System on a chip
Proceedings Article | 6 October 1998 Paper
Calibration of x-ray digital tomosynthesis system including the compensation for image distortion
Young Jun Roh, Kuk Won Koh, Hyungsuck Cho, Jin-Young Kim, Hyung Kim, Jong-Eun Byun
Proceedings Volume 3521, (1998) https://doi.org/10.1117/12.326966
KEYWORDS: X-rays, X-ray imaging, Image intensifiers, Distortion, Calibration, X-ray sources, Inspection, Imaging systems, Digital imaging, Digital x-ray imaging
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