Dr. Jin Choi
Territory Manager at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (27)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11610, Novel Patterning Technologies 2021
KEYWORDS: Optical proximity correction, Mask making, Electronic design automation

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Lithography, Optical lithography, Modulation, Ecosystems, Data processing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Data corrections

Proceedings Article | 16 October 2017 Paper
Proc. SPIE. 10451, Photomask Technology 2017
KEYWORDS: Modulation, Data processing, Photomasks, Computer aided design

Proceedings Article | 3 October 2016 Paper
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Electron beam lithography, Electron beams, Optical lithography, Modulation, Distortion, Image registration, Photomasks, Optical simulations, Neodymium, Vestigial sideband modulation

Proceedings Article | 22 March 2016 Paper
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Scanning electron microscopy, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Vestigial sideband modulation, Diamond patterning

Showing 5 of 27 publications
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