Jin Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Metals, Design for manufacturing, Chemical mechanical planarization, Silicon, Reliability, Optical proximity correction, Semiconducting wafers, Extreme ultraviolet lithography, Manufacturing, Yield improvement

Proceedings Article | 4 April 2019 Presentation + Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Computer aided design, Metals, Resolution enhancement technologies, Optical lithography, CMOS technology, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Double patterning technology, Manufacturing

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top