Jin Zhou
at Chongqing Institute of Metrology and Quality Inspection
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 4 April 2023 Paper
Proceedings Volume 12617, 1261774 (2023) https://doi.org/10.1117/12.2666786
KEYWORDS: Sensors, Laser systems engineering, Laser interferometry, Calibration, Autocollimators, Metrology, Error control coding, Optical encoders, Lithium, Interpolation

Proceedings Article | 24 November 2021 Paper
Proceedings Volume 12065, 1206519 (2021) https://doi.org/10.1117/12.2605341
KEYWORDS: Inspection, 3D metrology, Laser scanners, Scanners, 3D modeling, 3D scanning, Sensors, Metrology, Manufacturing, Time metrology

Proceedings Article | 12 March 2021 Paper
Proceedings Volume 11763, 117638P (2021) https://doi.org/10.1117/12.2587611

Proceedings Article | 12 March 2021 Paper
Proceedings Volume 11763, 117635R (2021) https://doi.org/10.1117/12.2587271

Proceedings Article | 10 October 2020 Poster + Paper
Proceedings Volume 11556, 115560L (2020) https://doi.org/10.1117/12.2572688
KEYWORDS: Scanning probe microscopes, 3D metrology, Semiconductor manufacturing, Space reconnaissance, 3D scanning, Solids, Image resolution, Calibration

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