Jing Li
at Nanyang Tech Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 3 October 2003 Paper
Proc. SPIE. 5145, Microsystems Engineering: Metrology and Inspection III
KEYWORDS: Microelectromechanical systems, Oxides, Etching, Silicon, Deep reactive ion etching, Plasma enhanced chemical vapor deposition, Optical switching, Reactive ion etching, Semiconducting wafers, Anisotropic etching

Proceedings Article | 3 September 2002 Paper
Proc. SPIE. 4907, Optical Switching and Optical Interconnection II
KEYWORDS: Microelectromechanical systems, Switches, Switching, Fiber Bragg gratings, Signal attenuation, Metals, Silicon, Thermal effects, Micromirrors, Optical switching

Proceedings Article | 19 April 2002 Paper
Proc. SPIE. 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
KEYWORDS: Oxides, Mirrors, Switches, Etching, Metals, Silicon, Optical fabrication, Photomasks, Nanoimprint lithography, Optical switching

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