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Dr. Jing Zhang
at North China Univ. of Technology
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Author
Publications (4)
Proceedings Article | 20 March 2020 Paper
High speed, high accuracy displacement extraction from sinusoidal like Moiré fringes in a novel optical encoding technology
Proceedings Volume 11325, 1132534 (2020) https://doi.org/10.1117/12.2563956
KEYWORDS: Computer programming, Calibration, Digital imaging, Optical sensors, Cameras, Wavelet transforms, Optical encoders, Fringe analysis, CMOS sensors, Fourier transforms
Proceedings Article | 8 November 2018 Paper
Automatic control of LED light source for wafer height leveling in electron beam imaging systems
Proceedings Volume 10819, 108190O (2018) https://doi.org/10.1117/12.2503470
KEYWORDS: Light emitting diodes, Semiconducting wafers, Wafer-level optics, Image transmission, Sensors, Image processing, Light sources, Cameras, Control systems, Feedback control
Proceedings Article | 3 October 2018 Paper
Optimization of absorber and multilayer in EUV mask for 1D and 2D patterns
Proceedings Volume 10809, 1080919 (2018) https://doi.org/10.1117/12.2501463
KEYWORDS: Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Image resolution, Image quality, Light sources, Lithographic illumination, 3D modeling
Proceedings Article | 3 October 2018 Paper
2D SRAF rule extraction for fast application based on model-based results
Proceedings Volume 10810, 108101E (2018) https://doi.org/10.1117/12.2501455
KEYWORDS: SRAF, Model-based design, Microelectronics, Photomasks, Image classification, Extreme ultraviolet, Manufacturing, Roads, Extreme ultraviolet lithography
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