Dr. Jing Zhang
at North China Univ. of Technology
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Computer programming, Calibration, Digital imaging, Optical sensors, Cameras, Wavelet transforms, Optical encoders, Fringe analysis, CMOS sensors, Fourier transforms

Proceedings Article | 8 November 2018 Paper
Proc. SPIE. 10819, Optical Metrology and Inspection for Industrial Applications V
KEYWORDS: Light emitting diodes, Semiconducting wafers, Wafer-level optics, Image transmission, Sensors, Image processing, Light sources, Cameras, Control systems, Feedback control

Proceedings Article | 3 October 2018 Paper
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Image resolution, Image quality, Light sources, Lithographic illumination, 3D modeling

Proceedings Article | 3 October 2018 Paper
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: SRAF, Model-based design, Microelectronics, Photomasks, Image classification, Extreme ultraviolet, Manufacturing, Roads, Extreme ultraviolet lithography

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