Dr. Jingmin Leng
Senior Member of Techical Staff at KLA Corp
SPIE Involvement:
Author | Science Fair Judge
Publications (9)

Proceedings Article | 22 March 2008 Paper
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Oxides, Metrology, Deep ultraviolet, Ultraviolet radiation, Transmission electron microscopy, Scatterometry, Semiconducting wafers, Scatter measurement, UV optics, Single crystal X-ray diffraction

Proceedings Article | 10 May 2005 Paper
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Oxides, Thin films, Ellipsometry, Dispersion, Inspection, Diagnostics, Reflectometry, Reflectance spectroscopy, Semiconducting wafers, Line scan image sensors

Proceedings Article | 10 May 2005 Paper
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Carbon, Ellipsometry, Refractive index, Data modeling, Optical properties, Etching, Reflectometry, Reflectance spectroscopy, Semiconducting wafers, Anisotropy

Proceedings Article | 24 May 2004 Paper
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Metrology, Silicon, Scanning electron microscopy, Scatterometry, Mathematics, Critical dimension metrology, Neodymium, Numerical stability, Diffusion tensor imaging, Bohrium

Proceedings Article | 4 November 2003 Paper
Proc. SPIE. 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
KEYWORDS: Oxides, Thin films, Genetic algorithms, Calibration, Silicon, Reflectivity, Reflectometry, Silicon films, Semiconducting wafers, Standards development

Showing 5 of 9 publications
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