Ms. Jinjing Fu Profile

Jinjing Fu

at A*STAR Agency for Science, Technology and Research

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Publications (1)

Proceedings Article | 5 March 2021 Presentation + Paper

Miniaturized gas sensor based on silicon substrate-integrated hollow waveguides

Shaonan Zheng, Hong Cai, Linfang Xu, Nanxi Li, Jinjing Fu, Zhonghua Gu, Yao Zhang, Weiguo Chen, Yuxi Cui, Fuu Ming Kai, Lennon Yao Ting Lee

Proceedings Volume 11689, 116890C (2021) https://doi.org/10.1117/12.2581814

KEYWORDS: Gas sensors, Silicon, Hollow waveguides, Semiconducting wafers, Sensors, Infrared technology, Deep reactive ion etching, Carbon dioxide, Wet etching, Waveguides

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