CONFERENCE PROCEEDINGS
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Dr. Jinwon Park
at KRISS
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 18 August 2005 Paper
Development of a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer
Cheon Il Eom, Jinwon Park, Jaegeun Jo, Sangho Byun
Proceedings Volume 5879, 587912 (2005) https://doi.org/10.1117/12.619174
KEYWORDS: Interferometers, X-rays, X-ray optics, Calibration, Optical calibration, Sensors, Nonlinear optics, Sensor calibration, Beam splitters, Mirrors
Proceedings Article | 2 August 2004 Paper
LVDT calibration using a phase modulation optical interferometer calibrated by an x-ray interferometer
Jeong Eun Kim, Cheon Il Eom, Sang Ho Byun, Jae Gun Jo, Jin Won Park
Proceedings Volume 5532, (2004) https://doi.org/10.1117/12.563895
KEYWORDS: Interferometers, X-rays, X-ray optics, Calibration, Optical calibration, Modulation, Phase modulation, Beam splitters, Phase interferometry, Sensors
Proceedings Article | 20 November 2003 Paper
Calibration of nanotransducer by a monolithic x-ray interferometer
Sang Byun, Jin Won Park, Cheon Il Eom
Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.509725
KEYWORDS: X-rays, Interferometers, Calibration, Error analysis, Crystals, Silicon, X-ray optics, Transducers, Signal detection, Sensors
Proceedings Article | 2 June 2000 Paper
Effects of alignment accuracy on CMP process for overlay control
Bong-Ho Kim, Jinwon Park, Hyun-Jo Yang, GuChul Joung, Jeong Soo Kim, Jong-Kyun Hong
Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386500
KEYWORDS: Optical alignment, Polishing, Chemical mechanical planarization, Tungsten, Oxides, Overlay metrology, Semiconducting wafers, Process control, Optical lithography, Metrology
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