Prof. Jinyu Zhang Profile

Prof. Jinyu Zhang

at Tsinghua Univ

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Publications (3)

Proceedings Article | 9 September 2013 Paper

A fast convolution method using basis expansion for highly efficient intensity calculation in mask optimization

Yaping Sun, Yehua Zuo, Jinyu Zhang, Yan Wang, Zhiping Yu

Proceedings Volume 8880, 888026 (2013) https://doi.org/10.1117/12.2027487

KEYWORDS: Convolution, Matrices, Photomasks, Lithography, Atrial fibrillation, Rutherfordium, Source mask optimization, Actinium, Wavelets, Electromagnetic coupling

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Proceedings Article | 23 September 2009 Paper

Sub-resolution assist features placement using cost-function-reduction method

Jinyu Zhang, Wei Xiong, Yan Wang, Zhiping Yu, Min-Chun Tsai

Proceedings Volume 7488, 748811 (2009) https://doi.org/10.1117/12.834099

KEYWORDS: Photomasks, SRAF, Binary data, Atrial fibrillation, Semiconducting wafers, Optical proximity correction, Double patterning technology, Lithography, Optimization (mathematics), Algorithms

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Proceedings Article | 11 May 2009 Paper

GPU-accelerated inverse lithography technique

Jinyu Zhang, Yangdong Deng, Wei Xiong, Yao Peng, Zhiping Yu

Proceedings Volume 7379, 73790Z (2009) https://doi.org/10.1117/12.824276

KEYWORDS: Photomasks, Lithography, Matrices, Convolution, Optimization (mathematics), Computer programming, Visualization, Surface plasmons, Resolution enhancement technologies, Inverse problems

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