Dr. Jiuning Hu Profile

Dr. Jiuning Hu

at ASML

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation

Computational lithography and patterning evaluation to support EUV high-NA stitching

Cyrus Tabery, Jiuning Hu, Rongkuo Zhao, Christoph Hennerkes, Stephen Hsu, Yunbo Liu, Natalia Davydova, Victor Blanco, Vincent Wiaux

Proceedings Volume PC12953, PC129530M (2024) https://doi.org/10.1117/12.3012722

KEYWORDS: Optical lithography, Reticles, Extreme ultraviolet, Process control, Critical dimension metrology, Computational lithography, Design and modelling, Optical proximity correction, Imaging systems, Tantalum

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SPIE Journal Paper | 30 January 2024

Curvilinear data representation and its impact on file size and lithographic performance

Jiuning Hu, Adam Lyons, Chris Spence, Kurt Wampler, Mahmoud Mohsen, Yen-Wen Lu, Rachit Gupta, Youping Zhang, Rafael Howell, Jiyoon Chang, James Moon, Jun Ye

JM3, Vol. 23, Issue 01, 011204, (January 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.1.011204

KEYWORDS: Microchannel plates, Optical proximity correction, Lithography, Extreme ultraviolet, Deep ultraviolet, Solids, SRAF, Metals, Photovoltaics, Data storage

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Proceedings Article | 28 April 2023 Presentation + Paper

Curvilinear data representation and its impact on file size and lithographic performance

Jiuning Hu, Adam Lyons, Chris Spence, Kurt Wampler, Mahmoud Mohsen, Yen-Wen Lu, Rachit Gupta, Youping Zhang, Rafael Howell, Jun Ye

Proceedings Volume 12495, 1249506 (2023) https://doi.org/10.1117/12.2658649

KEYWORDS: Optical proximity correction, Lithography, Extreme ultraviolet, Deep ultraviolet, Data storage

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