Dr. Jo Finders
Senior Imaging Scientist/Fellow at ASML Netherlands BV
SPIE Involvement:
Author | Editor
Publications (111)

Proceedings Article | 7 January 2021 Presentation + Paper
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Optical lithography, Sensors, Scanners, Lens design, Buildings, Printing, Projection systems, Extreme ultraviolet lithography, High volume manufacturing, Device simulation

Proceedings Article | 30 October 2020 Presentation + Paper
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Wafer-level optics, Lithography, Diffraction, Deep ultraviolet, Scanners, Manufacturing, Photomasks, Extreme ultraviolet lithography, Photoresist processing, Semiconducting wafers

Proceedings Article | 20 September 2020 Presentation
Proc. SPIE. 11518, Photomask Technology 2020
KEYWORDS: Reticles, Deep ultraviolet, Scanners, Manufacturing, Physics, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics, Phase shifts

Proceedings Article | 12 May 2020 Presentation + Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Optical lithography, Inspection, Finite element methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers, Stochastic processes

SPIE Journal Paper | 6 May 2020
JM3 Vol. 19 Issue 02
KEYWORDS: Diffraction, Photomasks, Phase shifts, Picosecond phenomena, 3D modeling, Extreme ultraviolet, Refractive index, Scanners, Nanoimprint lithography, Tantalum

Showing 5 of 111 publications
Proceedings Volume Editor (4)

SPIE Conference Volume | 25 September 2018

SPIE Conference Volume | 18 October 2017

SPIE Conference Volume | 26 October 2016

SPIE Conference Volume | 18 September 2015

Conference Committee Involvement (11)
35th European Mask and Lithography Conference (EMLC 2019)
17 June 2019 | Dresden, Germany
34th European Mask and Lithography Conference
18 June 2018 | Grenoble, France
33rd European Mask and Lithography Conference
26 June 2017 | Dresden, Germany
Optical Microlithography XXX
28 February 2017 | San Jose, California, United States
32nd European Mask and Lithography Conference
21 June 2016 | Dresden, Germany
Showing 5 of 11 Conference Committees
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