Dr. Jörg Mick
Graduate Engineer at temicon GmbH
SPIE Involvement:
Area of Expertise:
interference lithography , nanostructures , optics , microstructures , seamless large area structuring , processes
Profile Summary

Expertise in seamless large area micro- and nanostructuring on large areas in photoresists. Additional experience in tooling, e.g. metallic (nickel) tools, PDMS or polyermic molds for replication purposes. Such molds might be used for high volume mass replication processes like UV-roll-to-roll embossing, hot-embossing, injection molding, etc. Besides interference lithography, other tooling technologies like UV-lithography, diamond cutting, e-beam structuring, ... are well known.
Publications (5)

Proceedings Article | 20 February 2017 Paper
Proc. SPIE. 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X
KEYWORDS: Lithography, Nanostructures, Nanostructuring, Polymers, Nickel, Diffusion, Control systems, Life sciences, Photoresist materials, Diffusers, Light sources and illumination, Nanolithography, Diffraction gratings

Proceedings Article | 6 May 2005 Paper
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Optical components, Lithography, Lenses, Polymers, Glasses, Silicon, Photoresist materials, Photomicroscopy, Solar energy systems, Optics manufacturing

SPIE Journal Paper | 1 November 2004
OE Vol. 43 Issue 11
KEYWORDS: Antireflective coatings, Photoresist materials, Optics manufacturing, Lithography, Compound parabolic concentrators, Sun, Refractive index, Diffusers, Solar cells, Polymers

Proceedings Article | 8 September 2004 Paper
Proc. SPIE. 5454, Micro-Optics: Fabrication, Packaging, and Integration
KEYWORDS: Lithography, Optical properties, Polymers, Ultraviolet radiation, Nickel, Coating, Manufacturing, Photoresist materials, Transmittance, Photoresist developing

Proceedings Article | 29 December 2003 Paper
Proc. SPIE. 5184, Physics, Theory, and Applications of Periodic Structures in Optics II
KEYWORDS: Lithography, Refractive index, Antireflective coatings, Prisms, Sun, Polymers, Solar cells, Photoresist materials, Diffusers, Compound parabolic concentrators

  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top