Dr. Johann Krauter Profile

Dr. Johann Krauter

Development Engineer at TRUMPF SE + Co KG

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Publications (7)

Proceedings Article | 18 August 2018 Paper

Inspection of hidden MEMS by an infrared low-coherence interferometric microscope

Johann Krauter, Wolfgang Osten

Proceedings Volume 10749, 1074911 (2018) https://doi.org/10.1117/12.2319575

KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Silicon, Interferometry, Microscopes, Sensors, Infrared radiation, Interferometers, Refractive index, Inspection

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Proceedings Article | 26 June 2017 Paper

Optical inspection of hidden MEMS structures

Johann Krauter, Marc Gronle, Wolfgang Osten

Proceedings Volume 10329, 1032914 (2017) https://doi.org/10.1117/12.2269499

KEYWORDS: Semiconducting wafers, Safety, Packaging, Wafer-level optics, Interferometers, Microelectromechanical systems, Optical inspection, Sensors, Interferometry, Silica, Short wave infrared radiation, Optical metrology, Inspection, Optical testing, Confocal microscopy

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Proceedings Article | 27 April 2016 Paper

Wafer-level fabrication of arrays of glass lens doublets

Nicolas Passilly, Stéphane Perrin, Jorge Albero, Johann Krauter, Olivier Gaiffe, Ludovic Gauthier-Manuel, Luc Froehly, Justine Lullin, Sylwester Bargiel, Wolfgang Osten, Christophe Gorecki

Proceedings Volume 9888, 98880T (2016) https://doi.org/10.1117/12.2228833

KEYWORDS: Optical components, Polishing, Micro optics, Glasses, Optical aberrations, Semiconducting wafers, Microlens

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Systems for imaging require to employ high quality optical components in order to dispose of optical aberrations and thus reach sufficient resolution. However, well-known methods to get rid of optical aberrations, such as aspherical profiles or diffractive corrections are not easy to apply to micro-optics. In particular, some of these methods rely on polymers which cannot be associated when such lenses are to be used in integrated devices requiring high temperature process for their further assembly and separation. Among the different approaches, the most common is the lens splitting that consists in dividing the focusing power between two or more optical components. In here, we propose to take advantage of a wafer-level technique, devoted to the generation of glass lenses, which involves thermal reflow in silicon cavities to generate lens doublets. After the convex lens sides are generated, grinding and polishing of both stack sides allow, on the first hand, to form the planar lens backside and, on the other hand, to open the silicon cavity. Nevertheless, silicon frames are then kept and thinned down to form well-controlled and auto-aligned spacers between the lenses. Subsequent accurate vertical assembly of the glass lens arrays is performed by anodic bonding. The latter ensures a high level of alignment both laterally and axially since no additional material is required. Thanks to polishing, the generated lens doublets are then as thin as several hundreds of microns and compatible with micro-opto-electro-systems (MOEMS) technologies since they are only made of glass and silicon. The generated optical module is then robust and provide improved optical performances. Indeed, theoretically, two stacked lenses with similar features and spherical profiles can be almost diffraction limited whereas a single lens characterized by the same numerical aperture than the doublet presents five times higher wavefront error. To demonstrate such assumption, we fabricated glass lens doublets and compared them to single lenses of equivalent focusing power. For similar illumination, the optical aberrations are significantly reduced.

Proceedings Article | 26 April 2016 Paper

Array-type miniature interferometer as the core optical microsystem of an optical coherence tomography device for tissue inspection

Nicolas Passilly, Stéphane Perrin, Justine Lullin, Jorge Albero, Sylwester Bargiel, Luc Froehly, Christophe Gorecki, Johann Krauter, Wolfgang Osten, Wei-Shan Wang, Maik Wiemer

Proceedings Volume 9890, 98900C (2016) https://doi.org/10.1117/12.2229477

KEYWORDS: Skin, Microopto electromechanical systems, Optical coherence tomography, Microsystems, Mirrors, Silicon, Semiconducting wafers, Beam splitters

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Proceedings Article | 1 September 2015 Paper

Performance analysis of a full-field and full-range swept-source OCT system

J. Krauter, T. Boettcher, K. Körner, M. Gronle, W. Osten, N. Passilly, L. Froehly, S. Perrin, C. Gorecki

Proceedings Volume 9576, 957609 (2015) https://doi.org/10.1117/12.2189885

KEYWORDS: Optical coherence tomography, Mirrors, Sensors, Light sources, Cameras, Imaging systems, Objectives, Signal processing, Optical imaging, Beam splitters

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Proceedings Article | 22 June 2015 Paper

Full-field swept-source optical coherence tomography with phase-shifting techniques for skin cancer detection

J. Krauter, T. Boettcher, K. Körner, M. Gronle, W. Osten, N. Passilly, L. Froehly, S. Perrin, C. Gorecki

Proceedings Volume 9529, 952913 (2015) https://doi.org/10.1117/12.2189278

KEYWORDS: Optical coherence tomography, Cameras, Phase shifts, Mirrors, Light sources, Signal to noise ratio, Skin cancer, Molybdenum, Interferometers, Phase shifting

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Proceedings Article | 1 May 2014 Paper

Optical design of a vertically integrated array-type Mirau-based OCT system

J. Krauter, T. Boettcher, W. Lyda, W. Osten, N. Passilly, L. Froehly, S. Bargiel, J. Albero, S. Perrin, J. Lullin, C. Gorecki

Proceedings Volume 9132, 91320L (2014) https://doi.org/10.1117/12.2054573

KEYWORDS: Optical coherence tomography, Interferometers, Optical design, Skin, Beam splitters, Sensors, Cameras, Imaging systems, Electroluminescent displays, Tissue optics

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Showing 5 of 7 publications

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