Dr. Seryeyohan Cho Profile

Dr. Seryeyohan Cho

Senior Researcher at SEMES

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Publications (1)

Proceedings Article | 23 November 2024 Presentation + Paper

Development of laser-assisted CD correction system in EUV masks

JongKeun Oh, Geonhui Park, YongWoo Kim, JongJu Park, JungJin Kim, SangHee Lee, Hyun Yoon, Seryeyohan Cho, KiHoon Choi

Proceedings Volume 13216, 132161Y (2024) https://doi.org/10.1117/12.3034358

KEYWORDS: Critical dimension metrology, Laser development, Extreme ultraviolet, Photomasks, Deep ultraviolet, Quality management, Quality control, Wet etching, Transmittance, Reflection

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