Dr. John A. Dagata
at National Institute of Standards and Technology
SPIE Involvement:
Publications (9)

Proceedings Article | 16 September 2014 Paper
Proc. SPIE. 9236, Scanning Microscopies 2014
KEYWORDS: Gold, Mica, Metrology, Data modeling, Calibration, Nanoparticles, Particles, Nitrogen, Atomic force microscopy, Standards development

Proceedings Article | 9 September 2008 Paper
Proc. SPIE. 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II
KEYWORDS: Mica, Metrology, Nanoparticles, Polymers, Particles, Manufacturing, Scanning electron microscopy, Nanomaterials, Scanning probe microscopy, Nanocrystals

Proceedings Article | 22 August 2001 Paper
Proc. SPIE. 4344, Metrology, Inspection, and Process Control for Microlithography XV
KEYWORDS: Semiconductors, Lithography, Microscopy, Dielectrics, Silicon, Scanning electron microscopy, Capacitance, Scanning probe microscopy, Standards development, Carbon nanotubes

Proceedings Article | 1 November 1997 Paper
Proc. SPIE. 3134, Optical Manufacturing and Testing II
KEYWORDS: Diamond, Polishing, Iron, Foam, Glasses, Silicon, Silicon films, Aluminum, Silicon carbide, Surface finishing

Proceedings Article | 26 May 1994 Paper
Proc. SPIE. 2141, Spectroscopic Characterization Techniques for Semiconductor Technology V
KEYWORDS: Oxides, Solar energy, Etching, Spectroscopy, Electrons, Interfaces, Ions, Gallium arsenide, Gallium, Arsenic

Showing 5 of 9 publications
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