Prof. John G. Ekerdt
at Univ of Texas at Austin
SPIE Involvement:
Publications (16)

Proceedings Article | 24 February 2017 Presentation + Paper
Proc. SPIE. 10105, Oxide-based Materials and Devices VIII
KEYWORDS: Semiconductors, Oxides, Annealing, Crystals, Germanium, Silicon, Oxygen, Atomic layer deposition, Lanthanum, Heteroepitaxy, Functional oxides, Perovskite

Proceedings Article | 16 March 2016 Paper
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Oxides, Magnesium, Data modeling, Calibration, Etching, Dry etching, Electrons, Ions, Chemistry, Plasma etching, Optimization (mathematics), Autoregressive models, Statistical modeling, Plasma, Bayesian inference

Proceedings Article | 8 March 2014 Paper
Proc. SPIE. 8987, Oxide-based Materials and Devices V
KEYWORDS: Diffraction, Annealing, Crystals, X-rays, X-ray diffraction, Interfaces, Silicon, Atomic layer deposition, Aluminum, Lanthanum

SPIE Journal Paper | 1 July 2008
JM3 Vol. 7 Issue 03
KEYWORDS: Polymers, Interfaces, Quartz, Adhesives, Etching, Liquids, Silicon, Lithography, Mechanics, Natural surfaces

Proceedings Article | 20 March 2008 Paper
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithography, Mechanics, Etching, Quartz, Polymers, Interfaces, Silicon, Adhesives, Polymer thin films, Liquids

Showing 5 of 16 publications
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