Dr. John Fielden Profile

Dr. John Fielden

Senior Principal Engineer at KLA Corp

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Publications (3)

Proceedings Article | 23 March 2009 Paper

Dark-field optical scatterometry for line-width-roughness metrology

G. Vera Zhuang, Steven Spielman, John Fielden, Daniel Wack, Leonid Poslavsky, Benjamin Bunday

Proceedings Volume 7272, 72720L (2009) https://doi.org/10.1117/12.813007

KEYWORDS: Line width roughness, Critical dimension metrology, Light scattering, Line edge roughness, Scattering, Semiconducting wafers, Scanning electron microscopy, Metrology, Scatterometry, Diffraction

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Proceedings Article | 24 March 2008 Paper

Opportunities and challenges for optical CD metrology in double patterning process control

Daniel Wack, John Hench, Leonid Poslavsky, John Fielden, Vera Zhuang, Walter Mieher, Ted Dziura

Proceedings Volume 6922, 69221N (2008) https://doi.org/10.1117/12.772997

KEYWORDS: Metrology, Process control, Etching, Critical dimension metrology, Systems modeling, Spectroscopy, Double patterning technology, Optical lithography, Performance modeling, Reflectometry

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Proceedings Article | 1 June 1991 Paper

Reconstructing MR images from incomplete Fourier data using the maximum entropy method

John Fielden, Henry Kwong, Jacob Wilbrink

Proceedings Volume 1445, (1991) https://doi.org/10.1117/12.45212

KEYWORDS: Correlation function, Image processing, Computer programming, Magnetic resonance imaging, Image resolution, Signal processing, Reconstruction algorithms, Visualization, Image restoration, Fourier transforms

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