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John Grossiord

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Proceedings Article | 17 September 2018 Presentation + Paper

The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors

Ian Lacey, Kevan Anderson, Gary Centers, Ralf Geckeler, Gevork Gevorkyan, John Grossiord, Andreas Just, Theo Nicolot, Brian Smith, Valeriy Yashchuk

Proceedings Volume 10760, 1076002 (2018) https://doi.org/10.1117/12.2321347

KEYWORDS: Mirrors, Calibration, Metrology, X-ray optics, X-rays, Autocollimators, Gaussian filters, Sensors

Read Abstract +

To preserve the brightness and coherence of x-rays produced by diffraction-limited-storage-ring (DLSR) and free-electron- laser (FEL) light sources, beamline optics must have unprecedented quality. For example, in the case of the most advanced beamlines for the DLSR source under development at the Advanced Light Source (ALS), the ALS-U, we need highly curved x-ray mirrors with surface slope tolerances better than 50–100 nrad (root-mean-square, rms). At the ALS X-Ray Optics Lab (XROL), we are working on the development of a new Optical Surface Measuring System (OSMS) with the required measurement accuracy. The OSMS is capable for the two-dimensional (2D) surface slope metrology over the spatial range from the sub-mm scale to the clear aperture. Usage of different arrangements of the OSMS sensors allows measuring the mirrors in the face-up or side-facing orientation, corresponding to the beamline application. The OSMS translation system and data acquisition software are designed to support multi scan measurement runs optimized for automatic suppression and compensation of instrumental drifts and major angular and spatial systematic errors. Here, we discuss the recent results of the OSMS research and development project. We provide details of the OSMS design and describe results of experimental performance tests of the gantry system. In particular, we show that the system is capable for measurement repeatability with strongly curved mirrors on the level of 20 nrad (rms). The high angular resolution of the OSMS rotational tip-tilt stage is adequate for implementation of instrumental calibration with using the mirror under test as a reference. The achieved measuring accuracy is demonstrated via comparison to metrology with the carefully calibrated Developmental Long Trace Profiler, also available at the XROL.

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