Dr. John Kim
at Synopsys Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11328, 113280Y (2020) https://doi.org/10.1117/12.2553656
KEYWORDS: Device simulation, Optical lithography, Silicon, Semiconducting wafers, Process modeling, Visualization, Lithography, Design for manufacturing

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