The laser damage test for qualifying a coating run of anti-reflection coated optics consists of scanning a pulsed 1064 nm laser to illuminate approximately 2400 sites over a 1 cm x 1 cm area on a test sample. Scans are repeated at 3 J/cm2 increments until the fluence specification for the optic is reached. In the past, initiation of 1 or more damage sites was classified as a failed coating run, requiring the production optics in the corresponding coating lot be reworked and recoated. Recent laser damage growth tests of 300 repetitive pulses performed on numerous damage sites revealed that all were stable up to 20 J/cm2. Therefore the acceptance criteria has been modified to allow a moderate number of damage sites, as long as they are smaller than the allowed dig size and are stable (do not grow). Consequently many coating runs that previously would have been rejected are now accepted, resulting in higher yield, lower cost, and improved delivery schedule. The new test also provides assurance that initiated damage sites are stable during long term operation.
When completed, the National Ignition Facility (NIF) will provide laser energies in the Mega-joule range. Successful pulse amplification to these extremely high levels requires that all small optics, found earlier in the beamline, have stringent surface and laser fluence requirements. In addition, they must operate reliably for 30 years constituting hundreds of thousands of shots. As part of the first four beamlines, spherical and aspherical lenses were required for the beam relaying telescopes. The magneto-rheological technique allows for faster and more accurate finishing of aspheres. The spherical and aspherical lenses were final figured using both coventional-pitch polishing processes for high quality laser optics and the magneto-rheological finishing process. The purpose of this paper is to compare the surface properties between these two finishing processes. Some lenses were set aside from production for evaluation. The surface roughness in the mid-frequency range was measured and the scatter was studied. Laser damage testing at 1064 nm (3-ns pulse width) was performed on surfaces in both the uncoated and coated condition.
The high volume inspection equipment currently available to support development of EUV blanks is non-actinic. The same is anticipated for patterned EUV mask inspection. Once potential defects are identified and located by such non-actinic inspection techniques, it is essential to have instrumentation to perform detailed characterization, and if repairs are performed, re-evaluation. The ultimate metric for the acceptance or rejection of a mask due to a defect, is the wafer level impact. Thus, measuring the aerial image for the site under question is required. An EUV Aerial Image Microscope (“AIM”) similar to the current AIM tools for 248nm and 193nm exposure wavelength is the natural solution for this task. Due to the complicated manufacturing process of EUV blanks, AIM measurements might also be beneficial to accurately assessing the severity of a blank defect. This is an additional application for an EUV AIM as compared to today’s use.
In recognition of the critical role of an EUV AIM for the successful implementation of EUV blank and mask supply, International SEMATECH initiated this design study with the purpose to define the technical requirements for accurately simulating EUV scanner performance, demonstrating the feasibility to meet these requirements and to explore various technical approaches to building an EUV AIM tool.
The National Ignition Facility will be the highest energy laser in the world when completed. Many small optics (less than or equal to 14" in diameter) have stringent transport efficiency and some have very high laser fluence requirements. For optics to sustain high spectral efficiencies and survive high fluences for a 30-year operation, these optics have cleanliness requirements to assure optimal laser system performance. These optical components have insufficient surface areas to validate the particulate and organic contamination requirements by methods used for mechanical parts. Also, the common validation techniques require some sort of surface contact which is not compatible with handling of laser optics. This presentation describes alternate cleanliness validation methods developed for the NIF small optical components. An organic validation procedure was devised based on the spectral transmission sensitivity to contamination layers on coated and uncoated fused silica windows. Optics were scanned in the near infrared before and after an application of a specific amount of organic contamination onto the surface. Changes in transmission correlated to organic contamination levels and used to determine non-volatile organic contamination optics. A validation method for particulate contamination was demonstrated on a large window, showing that acceptable cleanliness levels could be achieved after a wet-wipe and inspection with a high intensity light. The method is similar to that used to inspect the surface quality of optical components.
While interferometry is routinely used for the characterization and alignment of lithographic optics, the ultimate performance metric for these optics is printing in photoresist. The comparison of lithographic imaging with that predicted from wavefront performance is also useful for verifying and improving the predictive power of wavefront metrology. To address these issues, static, small-field printing capabilities have been added to the EUV phase- shifting point diffraction interferometry implemented at the Advanced Light Source at Lawrence Berkeley National Laboratory. The combined system remains extremely flexible in that switching between interferometry and imaging modes can be accomplished in approximately two weeks.
An international round robin study was conducted on the absorption measurement of laser-quality coatings. Sets of optically coated samples were made by a reactive DC magnetron sputtering and an ion beam sputtering deposition process. The sample set included a high reflector at 514 nm and a high reflector for the near infrared (1030 to 1318 nm), single layers of silicon dioxide, tantalum pentoxide, and hafnium dioxide. For calibration purposes, a sample metalized with hafnium and an uncoated, superpolished fused silica substrate were also included. The set was sent to laboratory groups for absorptance measurement of these coatings. Whenever possible, each group was to measure a common, central area and another area specifically assigned to the respective group. Specific test protocols were also suggested in regards to the laser exposure time, power density, and surface preparation.
The atomic vapor laser isotope separation process uses high- average power lasers that have the commercial potential to enrich uranium for the electric power utilities. The transport of the laser beam through the laser system to the separation chambers requires high performance optical components, most of which have either fused silica or Zerodur as the substrate material. One of the requirements of the optical components is to preserve the wavefront quality of the laser beam that propagate over long distances. Full aperture tests with the high power process lasers and finite element analysis (FEA) have been performed on the transport optics. The wavefront distortions of the various sections of the transport path were measured with diagnostic Hartmann sensor packages. The FEA results were derived from an in-house thermal-structural- optical code which is linked to the commercially available CodeV program. In comparing the measured and predicted results, the bulk absorptance of fused silica was estimated to about 50 ppm/cm in the visible wavelength regime. Wavefront distortions will be reported on optics made from fused silica and Zerodur substrate materials.
Optical components needed for high-average-power lasers, such as those developed for Atomic Vapor Laser Isotope Separation (AVLIS), require high levels of performance and reliability. Over the past two decades, optical component requirements for this purpose have been optimized, and performance and reliability have been demonstrated. Many of the optical components that are exposed to the high-power laser light affect the quality of the beam as it is transported through the system. The specifications for these optics, including a few parameters not previously reported and some component manufacturing and testing experience, are described.
A tip-tilt control system has been built as part of the adaptive optics system for the Keck II telescope on Mauna Kea in Hawaii. This system is used to correct for wavefront tip-tilt when the adaptive optics system is in the laser guide star mode, and it uses a natural star as the reference. The system consists of a tip-tilt sensor, fast steering mirror, and digital controller. The tip-tilt sensor is based on a quadrant lens assembly with fiber-optics coupling to four photon counting silicon avalanche photodiodes. The fast steering mirror mount has three PZT actuators with position sensor, and an 8 inch Silicon Carbide lightweight mirror. The controller accommodates a range of integration times, and includes automatic light level control, and an adaptive control algorithm which optimizes control performance with changing tilt star image sizes. The design and performance characteristics of a tip- tilt control system for the Keck II telescope are presented.
The surface thermal lensing technique (STL) successfully resolved and measured the absorptance of transmissive optical components: near-normal angle-of-incidence anti-reflectors and beam splitters. The STL system uses an Ar ion laser to pump the components at 514.5 nm. The absorptance-induced surface deformation diffracts the HeNe probe beam into a photo- detector. The signal intensity was calibrated with a sample of known absorptance. The optical components were designed to function in a copper vapor laser (CVL) transport system, and were previously tested for absorptance with a high power CVL system at 511 nm. To assure proper absorptance data from the STL system, the pump laser power densities were set at the operational level of the coatings, absorptance time trends were monitored, and absorptance area scans were made. Both types of transmissive optics are more stable than the CVL high reflectors that were measured in another study. Parameter studies based on Fresnel diffraction theory were also performed to optimize experimental condition. The STL system was assessed to have 10 ppb sensitivity for absorption measurement given 2 W of pump power.
Optical component specifications for the high-average-power lasers and transport system used in the Atomic Vapor Laser Isotope Separation plant must address demanding system performance requirements. The need for high performance optics has to be balanced against the practical desire to reduce the supply risks of cost and schedule. This is addressed in optical system design, careful planning with the optical industry, demonstration of plant quality parts, qualification of optical suppliers and processes, comprehensive procedures for evaluation and test, and a plan for corrective action.
A uranium enrichment plant utilizing atomic vapor laser isotope separation technology is currently being planned. Deployment of the plant will require tens of thousands of commercial and custom optical components and subsystems. The plant optical system will be expected to perform at a high level of optical efficiency and reliability in a high- average-power-laser production environment. During construction, demand for this large number of optics must be coordinated with the manufacturing capacity of the optical industry. The general requirements and approach to ensure supply of optical components is described. Dynamic planning and a closely coupled relationship with the optics industry will be required to control cost, schedule,and quality.
Evaluation and testing of the optical components used in the atomic vapor laser isotope separation plant is critical for qualification of suppliers, developments of new optical multilayer designs and manufacturing processes, and assurance of performance in the production cycle. The range of specifications requires development of specialized test equipment and methods which are not routine or readily available in industry. Specifications are given on material characteristics such as index homogeneity, subsurface damage left after polishing, microscopic surface defects and contamination, coating absorption, and high average power laser damage. The approach to testing these performance characteristics and assuring the quality throughout the production cycle is described.
KEYWORDS: Laser beam diagnostics, Optical coatings, Reflectors, Absorption, Copper vapor lasers, Signal detection, Thermography, High power lasers, Temperature metrology, Thin film coatings
Surface thermal lensing is an alternate configuration of a photothermal deflection system that was used to measure low levels of optical absorption. The thermal lensing configuration facilitated the alignment of the pump and prove laser beams by using a larger diameter probe beam. This technique was applied to high performance optical coatings, specifically high reflectors at 511 nm, zero degrees angle of incidence. The absorptance of these coatings was previously measured using a high power copper vapor laser system. A high power copper laser beam is focused onto an approximately 2 mm diameter spot. A thermal camera senses the temperature rise with respect to the rest of the coating. The temperature change, power density and beam diameter were used with an empirical formula that yields optical absorption. The surface thermal lensing technique was able to resolve absorption levels lower than that achieved with the copper laser method.
An easy to use, nondestructive method for evaluating subsurface damage in polished substrates has been established at LLNL. Subsurface damage has been related to laser damage in coated optical components used in high power, high repetition rate laser systems. Total Internal Reflection Microscopy (TIRM) has been shown to be a viable nondestructive technique in analyzing subsurface damage in optical components. A successful TIRM system has been established for evaluating subsurface damage on fused silica components. Laser light scattering from subsurface damage sites is collected through a Nomarski microscope. These images are then captured by a CCD camera for analysis on a computer. A variety of optics, including components with intentional subsurface damage due to grinding and polishing, have been analyzed and their TIRM images compared to an existing destructive etching method. Methods for quantitative measurement of subsurface damage are also discussed.
Low absorption coatings were examined using a high repetition rate copper vapor laser to study the surface temperature as a function of incident power. Nonlinear absorption was observed in some of the coatings as a result of increased incident power. A variety of commercial coating vendors using common dielectric oxide material combinations were surveyed. Wavelength, coating material, and coating vendor were varied to study their affects on the linearity of the absorption. The films were deposited by electron beam or ion beam sputtering technologies. Changes in the film characteristics were observed after exposure to high incident power. The nature of these changes and their permanency were also examined.
Laser system performance and reliability depends on the related performance and reliability of the optical components which define the cavity and transport subsystems. High-average-power and long transport lengths impose specific requirements on component performance. The complexity of the manufacturing process for optical components requires a high degree of process control and verification. Qualification has proven effective in ensuring confidence in the procurement process for these optical components. Issues related to component reliability have been studied and provide useful information to better understand the long term performance and reliability of the laser system.
Ion beam sputtered (IBS) coatings offer some distinct advantages over electron beam deposited (e-beam) coatings, namely environmental stability and extremely low total losses. Initial IBS coatings had excessive stress and low laser damage thresholds. For these reasons, a study was initiated to examine potential laser damage thresholds and stress of IBS coatings. A material study was conducted of IBS coatings produced in industry, and a variety of design techniques were explored to increase laser damage thresholds. A post annealing process and backside coatings were developed to reduce the coating stress.
We describe a computer code that aids in the thermal, structural, and optical analysis of laser optical systems. Inputs to the computer model include energy absorption by coatings and substrates, thermal diffusion, expansion, and heat removal parameters. The program performs steady-state thermal and structural analyses based on geometrical ray traces through the optical system. We show examples to illustrate how this capability can assist in the optical system design process.
An effort is being made to understand the limits of survivability and damage for optical components exposed to a visible laser operating continuously at a high repetition rate over 4 kHz. Results of this work are reported and related to the materials and manufacturing conditions for the coatings and substrates as well as defects seen at the surface under laser illumination. These results were obtained for a variety of optical coatings and conditions using lasers from the Laser Demonstration Facility, part of the Atomic Vapor Laser Isotope Separation (AVLIS) Program at LLNL. Better understanding of the reliability of optical components in this environment could lead to improvements in design and manufacture that would result in reduced size for the laser optical system and correspondingly lower costs for the facilities that can use this technology.
A well controlled damage testing facility is vital for establishing confidence in production coatings for high power laser operation and for the understanding of damage phenomena. An upgraded damage test facility at LLNL now allows better control in measuring damage thresholds and absorption of thin film coatings as well as examination of sites where damage first occurs. A description of the system configuration using lasers from the Laser Isotope Separation (LIS) at the Laser Demonstration Facility (LDF) as well as the methods used to acquire damage thresholds will be given.
The nature of subsurface damage incurred during polishing of fused silica varies greatly with the polishing process. Although subsurface damage is known to lower laser damage thresholds for fused silica surfaces1''2 the effect on thresholds of coated dielectric surfaces has not been previously documented. This study describes features of subsurface damage due to polishing by ten commercial fabricators and compares laser damage thresholds of a high reflection coating on these surfaces.
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