Dr. Johnny H. He Profile

Dr. Johnny H. He

at Institute of Microelectronics

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 23 January 2006 Paper

Micro-Cantilever Resonance Sensor for Biomolecular Detection by Using Self-Assembly Nano-Particles

J. H. He, S. Q. Sun, Y. F. Li, J. S. Ye, J. M. Kong, Y. L. Cai, C. Li, T. M. Lim, W. C. Hui

Proceedings Volume 6112, 61120S (2006) https://doi.org/10.1117/12.647310

KEYWORDS: Gold, Nanoparticles, Atomic force microscopy, Sensors, Biosensors, Molecules, Reliability, Coating, Signal detection, Scanning electron microscopy

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Proceedings Article | 6 January 2006 Paper

A critical comparison and development of nano-mechanical characterization of MEMS/NEMS thin film materials

Johnny He, H. Le, J. Luo, Y. Fu, D. Moore

Proceedings Volume 6111, 61110T (2006) https://doi.org/10.1117/12.647295

KEYWORDS: Thin films, Microelectromechanical systems, Diamond, Silicon, Profilometers, Silicon carbide, Nickel, Silicon films, Etching, Low pressure chemical vapor deposition

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Proceedings Article | 1 July 2005 Paper

MEMS/NEMS mechanical characterization on different thin film materials by scanning along micro-machined cantilevers

J. H. He, J. K. Luo, H. R. Le, D. F. Moore

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608710

KEYWORDS: Silicon, Nickel, Thin films, Profilometers, Etching, Error analysis, Calibration, Statistical analysis, Finite element methods, Microelectromechanical systems

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Proceedings Article | 24 January 2004 Paper

Development of an all-metal electrothermal actuator and its applications

JiKui Luo, Johnny He, Andrew Flewitt, David Moore, S. Mark Spearing, Norman Fleck, Williams Milne

Proceedings Volume 5344, (2004) https://doi.org/10.1117/12.524098

KEYWORDS: Actuators, Nickel, Plating, Metals, Microelectromechanical systems, Resistance, Temperature metrology, Thin films, Silicon, Copper

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Proceedings Article | 15 April 2003 Paper

Laser micromachining of thin films for optoelectronic devices and packages

David Moore, John Williams, Matthew Hopcroft, Billy Boyle, Johnny He, Richard Syms

Proceedings Volume 4941, (2003) https://doi.org/10.1117/12.468490

KEYWORDS: Silicon carbide, Silicon, Etching, Laser cutting, Micromachining, Prototyping, Packaging, Silicon films, Thin films, Optoelectronic devices

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