CONFERENCE PROCEEDINGS
Advanced Search
Joichi Kawamura
at Sumitomo Heavy Industries Ltd
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 11 May 2004 Paper
Development of over 300 watts average power excimer laser
Kazuhiro Hirata, Joichi Kawamura, Hiroyuki Katou, Kazuaki Sajiki, Makoto Okada
Proceedings Volume 5334, (2004) https://doi.org/10.1117/12.528911
KEYWORDS: Excimer lasers, Pulsed laser operation, Servomechanisms, Annealing, Gas lasers, Laser stabilization, LCDs, High power lasers, Laser development, Laser processing
Proceedings Article | 16 August 2000 Paper
Maximum 300-W high-power excimer laser
Proceedings Volume 4065, (2000) https://doi.org/10.1117/12.407328
KEYWORDS: Excimer lasers, Lithium, High power lasers, Electrodes, Pulsed power, Magnetism, LCDs, Energy transfer, Annealing, Prototyping
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top