Jonas S. Madsen
at DFM A/S
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 17 March 2023 Presentation
Asbjørn Moltke, Jonas Madsen, Callum Smith, Rasmus Engelsholm, Erik Christensen, Mattia Michieletto, Jürgen Appel, Anders Brusch, Christian Petersen, Poul Erik Hansen, Christos Markos, Patrick Montague, Ole Bang
Proceedings Volume PC12405, PC1240507 (2023) https://doi.org/10.1117/12.2649984
KEYWORDS: Ultraviolet radiation, Modulation, Plasma, Lamps, Imaging spectroscopy, Scatterometry, Metrology, Light sources, Transmittance, Supercontinuum sources

Proceedings Article | 17 March 2023 Presentation
Asbjørn Moltke, Callum Smith, Rasmus Engelsholm, Erik Christensen, Mattia Michieletto, Jonas Madsen, Jürgen Appel, Anders Brusch, Poul Erik Hansen, Christian Petersen, Christos Markos, Patrick Montague, Ole Bang
Proceedings Volume PC12405, PC1240505 (2023) https://doi.org/10.1117/12.2649940
KEYWORDS: Modulation, Ultraviolet radiation, Optical coherence tomography, Deep ultraviolet

Proceedings Article | 2 March 2020 Paper
Proceedings Volume 11291, 1129111 (2020) https://doi.org/10.1117/12.2553680
KEYWORDS: Nanowires, Scanning electron microscopy, Scatterometry, Diffraction, Data modeling, Molecular beam epitaxy, Electron beam lithography

Proceedings Article | 26 June 2017 Paper
Proceedings Volume 10330, 103300J (2017) https://doi.org/10.1117/12.2270232
KEYWORDS: Modeling, Reflectivity, Silicon, Thin films, Inverse problems, Ellipsometry, Surface roughness, Scattering, Nanostructured thin films, Nanostructuring, Optical metrology, Metrology, Scatterometry

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