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Dr. Jong-Woo Shin
at Samsung Advanced Inst of Tech
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Publications (3)
Proceedings Article | 19 November 2001 Paper
Investigation of stress in aluminum thin film for MEMS applications
Jong-Woo Shin, Seok-Whan Chung, Dong-Sik Shim, Hyungjae Shin, Byeong Cheon Koh
Proceedings Volume 4593, (2001) https://doi.org/10.1117/12.448857
KEYWORDS: Aluminum, Diagnostics, Thin films, Sputter deposition, Silicon films, Microelectromechanical systems, Semiconducting wafers, Argon, Temperature metrology, Titanium
Proceedings Article | 15 March 1998 Paper
Automatic test equipment for the micromirror array
Hoseong Kim, Kwangwoo Cho, Yong-Kweon Kim, Jong-Woo Shin, Hyungjae Shin, Jae-Ho Moon
Proceedings Volume 3276, (1998) https://doi.org/10.1117/12.302387
KEYWORDS: Micromirrors, Mirrors, Signal processing, Video processing, Photodiodes, Reflectivity, CCD cameras, Video, Electronics, Aluminum
Proceedings Article | 13 September 1995 Paper
Fabrication of micromirror supported by electroplated nickel posts
Jong-Woo Shin, Seok-Whan Chung, Yong-Kweon Kim, Eun-Ho Lee, Beom-Gyu Choi, Se-Jin Ahn
Proceedings Volume 2641, (1995) https://doi.org/10.1117/12.220928
KEYWORDS: Mirrors, Nickel, Micromirrors, Aluminum, Electrodes, Photoresist materials, Electroplating, Silicon, Reactive ion etching, Etching
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