Dr. Jay Park Profile

Dr. Jay Park

Postdoctoral Fellow at Univ of Texas at Austin

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Publications (8)

Proceedings Article | 25 October 2013 Paper

Patterned resistive sheets for use in infrared microbolometers

Dean Neikirk, Hoo Kim, Jong Yeon Park, Joo-Yun Jung

Proceedings Volume 8899, 88990C (2013) https://doi.org/10.1117/12.2029200

KEYWORDS: Absorption, Microbolometers, Dielectrics, Long wavelength infrared, Infrared radiation, Metals, FT-IR spectroscopy, Skin, Infrared detectors, Sensors

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We review a wide range of absorbers based on patterned resistive sheets for use in mid-wave and long-wave infrared microbolometers. These structures range from wavelength selective dielectric coated Salisbury screens to patterned resistive sheets to stacked multi-spectral devices. For basic three color devices in the LWIR band we have designed and fabricated wavelength selective dielectric coated Salisbury screen (DSS) absorbers suitable for use in microbolometers. In order to produce wavelength selective narrowband absorption, the general design rules for DSS microbolometers show that the thickness of the air gap should be a half wavelength and the optical thickness of the dielectric support layer should be a quarter wavelength. This structure is also air gap tunable; i.e., by varying only air gap thickness, the center wavelength of the absorption curve is shifted. FTIR microscope measurements have been made on a number of the different devices demonstrating three color capability in the LWIR while maintain very high efficiency absorption. We have also shown that the use of a patterned resistive sheet consisting of a properly sized array of cross-shaped holes acts as a polarization independent frequency-selective absorber allowing a three-color system spanning the 7-14 micron band. For realistic metal layers the skin effect produces complex surface impedance that can be quite large in the LWIR band. We have shown that metal layers of thickness between one and three skin depths can act as the absorber layer, and have shown that thick metal layers can still produce excellent absorption in the LWIR. Holes in the dielectric support layer also reduce the thermal mass in the system without compromising spectral selectivity. Broadband designs using rectangular holes that produce substantially reduced thermal mass (over 50%) while maintaining efficient spectral absorption have also been found. Finally, we have considered multispectral stacked structures, including Jaumann absorbers and stacked dipole/slot patterned resistive sheets. These structures promise either two band (MWIR/LWIR) or two to three color LWIR in a multi-layer stacked pixel.

Proceedings Article | 16 February 2012 Paper

Fabrication and characterization of wavelength selective microbolometers using a planar self-aligned process for low deformation membranes

Jong Yeon Park, James Gardner, Praveen Pasupathy, Ji Won Suk, Rodney Ruoff, Dean Neikirk

Proceedings Volume 8252, 82520Y (2012) https://doi.org/10.1117/12.906290

KEYWORDS: Microbolometers, Dielectrics, Decision support systems, Germanium, Absorption, Oxygen, Plasma, Scanning electron microscopy, Thermography, Infrared radiation

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Proceedings Article | 4 May 2010 Paper

Skin depth effects in wavelength-selective infrared microbolometers based on lossy frequency selective surfaces

Joo-Yun Jung, Jong Yeon Park, Dean Neikirk, Aniruddha Weling, Will Haffer, James Goldie, Paul Wilson

Proceedings Volume 7660, 766018 (2010) https://doi.org/10.1117/12.850393

KEYWORDS: Skin, Absorption, Metals, Resistance, Long wavelength infrared, Copper, Microbolometers, Infrared radiation, Aluminum, Chromium

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Proceedings Article | 4 May 2010 Paper

Fabrication of wavelength selective germanium dielectric supported microbolometers

Jong Yeon Park, Joo-Yun Jung, Dean Neikirk, Aniruddha Weling, William Hafer, James Goldie, Paul Wilson

Proceedings Volume 7660, 76601C (2010) https://doi.org/10.1117/12.850456

KEYWORDS: Germanium, Dielectrics, Microbolometers, FT-IR spectroscopy, Oxygen, Decision support systems, Plasma, Resistance, Etching, Silicon

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Proceedings Article | 7 May 2009 Paper

Wavelength-selective infrared detectors based on cross patterned resistive sheets

Joo-Yun Jung, Jong Yeon Park, Dean Neikirk

Proceedings Volume 7298, 72980L (2009) https://doi.org/10.1117/12.818638

KEYWORDS: Dielectrics, Absorption, Dielectric polarization, Microbolometers, Long wavelength infrared, Resistance, Infrared detectors, Infrared radiation, Mirrors, FSS based metamaterials

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Proceedings Article | 27 July 2004 Paper

Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion

James Pak, Jihong Kim, Sang Woo Oh, Jee Hee Son, Sung Hwan Cho, Seung-Ki Lee, Jong-Yeon Park, Byungkyu Kim

Proceedings Volume 5385, (2004) https://doi.org/10.1117/12.539671

KEYWORDS: Actuators, Polymers, Silicon, Microfluidics, Platinum, Electroplating, Semiconducting wafers, Solids, Polymeric actuators, Liquids

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Proceedings Article | 21 November 2001 Paper

Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer

Jong-Yeon Park, Kuntae Kim, Sung Moon, Jong-Oh Park, Myung-Hwan Oh, James Jungho Pak

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448991

KEYWORDS: Antennas, Microelectromechanical systems, Microbolometers, 3D modeling, Ultraviolet radiation, Photoresist materials, Mirrors, Geometrical optics, Lithography, Scanning electron microscopy

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Proceedings Article | 21 November 2001 Paper

Enhanced performance of microbolometer using coupled feed horn antenna

Kuntae Kim, Jong-Yeon Park, HoKwan Kang, Jong-Oh Park, Sung Moon, Jung-Ho Park

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448992

KEYWORDS: Bolometers, Antennas, Absorption, Microbolometers, Surface micromachining, Photoresist materials, Sensors, Etching, Resistance, Signal to noise ratio

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Showing 5 of 8 publications

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