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Prof. Joong Hwee Cho
Professor at Incheon National Univ
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Publications (1)
Proceedings Article | 22 February 2021 Poster + Presentation
Actinic mask imaging using EUV ptychography microscope
Young Woong Kim, Byungmin Yoo, Dong Gi Lee, Chang Mo Ku, Joong Hwee Cho, Jinho Ahn
Proceedings Volume 11609, 116091Y (2021) https://doi.org/10.1117/12.2587895
KEYWORDS: Photomasks, Extreme ultraviolet, Microscopes, Reconstruction algorithms, Phase retrieval, Phase measurement, Image quality, Semiconductors, Semiconductor manufacturing, Phase shifts
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