Dr. Jörg Butschke
at IMS CHIPS
SPIE Involvement:
Author
Publications (53)

Proceedings Article | 13 May 2016 Presentation + Paper
Proc. SPIE. 9891, Silicon Photonics and Photonic Integrated Circuits V
KEYWORDS: Modulators, Waveguides, Multiplexers, Optical design

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Nanoimprint lithography, Diffractive optical elements, Silicon, Semiconducting wafers, Vestigial sideband modulation, Quartz, Electron beam lithography, Photomasks, Holograms, Etching

Proceedings Article | 9 September 2013 Paper
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Semiconducting wafers, Photomasks, Line width roughness, Point spread functions, Etching, Silicon, Cadmium sulfide, Resolution enhancement technologies, Chemically amplified resists, Resistance

Proceedings Article | 14 October 2011 Paper
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Photomasks, Silicon, Etching, Gold, Metals, Electron beam lithography, Semiconducting wafers, Scanning electron microscopy, Aluminum, Transistors

Proceedings Article | 23 September 2009 Paper
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Photomasks, Beam shaping, Data conversion, Magnesium, Electron beam lithography, Data processing, Visualization, Standards development, Lithography, Computer architecture

Showing 5 of 53 publications
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