Prof. Jörg Seewig
Full Professor at Technische Univ Kaiserslautern
SPIE Involvement:
Symposium Chair | Conference Program Committee | Author
Publications (17)

Proceedings Article | 5 March 2021 Presentation
Proc. SPIE. 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV
KEYWORDS: Calibration, Stars, Standards development, Point spread functions, Optical calibration, Optical aberrations, Lithography, Aberration correction

Proceedings Article | 21 August 2020 Presentation + Paper
Proc. SPIE. 11490, Interferometry XX
KEYWORDS: Calibration, Metrology, Standards development, Light sources, Microscopes, Optical sensors

Proceedings Article | 10 March 2020 Presentation
Proc. SPIE. 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII
KEYWORDS: Lithography, Metrology, Laser metrology, 3D metrology, Manufacturing, Optics manufacturing, Image resolution, Atomic force microscope, Laser systems engineering, 3D modeling

Proceedings Article | 21 June 2019 Presentation + Paper
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Neural networks, Convolution, Defect detection, Machine learning, Data modeling, Gaussian filters

Proceedings Article | 21 June 2019 Presentation + Paper
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Calibration, Standards development, Metrology, Spatial resolution, Manufacturing, Lithography, Sensor technology

Showing 5 of 17 publications
Conference Committee Involvement (8)
Optical Measurement Systems for Industrial Inspection XII
21 June 2021 | Online Only, Germany
SPIE Optical Metrology
21 June 2021 | Online Only, Germany
Optical Measurement Systems for Industrial Inspection XI
24 June 2019 | Munich, Germany
SPIE Optical Metrology
24 June 2019 | Munich, Germany
Optical Measurement Systems for Industrial Inspection X
26 June 2017 | Munich, Germany
Showing 5 of 8 Conference Committees
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