Dr. Joseph Fu
Technician at National Institute of Standards and Technology
SPIE Involvement:
Publications (21)

SPIE Journal Paper | 26 August 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Scanning electron microscopy, Line edge roughness, Carbon nanotubes, Atomic force microscope, Metrology, Atomic force microscopy, Standards development, Silicon, Manufacturing, Ion beams

SPIE Journal Paper | 4 June 2013
JM3 Vol. 12 Issue 02
KEYWORDS: Atomic force microscopy, Data modeling, 3D modeling, Numerical analysis, Error analysis, Metrology, Statistical modeling, Carbon nanotubes, Solids, Standards development

Proceedings Article | 3 April 2012 Paper
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Semiconductors, Metrology, Statistical analysis, Data modeling, 3D modeling, Atomic force microscopy, Numerical analysis, 3D metrology, Statistical modeling, Standards development

SPIE Journal Paper | 1 January 2011
JM3 Vol. 10 Issue 1
KEYWORDS: Calibration, Metrology, Atomic force microscope, Atomic force microscopy, Standards development, Error analysis, Interferometry, Scanners, Interferometers, Helium neon lasers

Proceedings Article | 10 June 2010 Paper
Proc. SPIE. 7729, Scanning Microscopy 2010
KEYWORDS: Metrology, Interferometers, Calibration, Scanners, Error analysis, Atomic force microscopy, Head, Atomic force microscope, Helium neon lasers, Standards development

Showing 5 of 21 publications
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