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Joshua A. Glasser
at KLA Corp
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 23 October 2015 Paper
Accurate defect die placement and nuisance defect reduction for reticle die-to-die inspections
Vincent Wen, L. R. Huang, C. J. Lin, Y. N. Tseng, W. H. Huang, Laurent Tuo, Mark Wylie, Ellison Chen, Elvik Wang, Joshua Glasser, Amrish Kelkar, David Wu
Proceedings Volume 9635, 96351Q (2015) https://doi.org/10.1117/12.2196931
KEYWORDS: Inspection, Reticles, Dysprosium, Defect detection, Optics manufacturing, Algorithm development, Defect inspection, Detection and tracking algorithms, Standards development, Time metrology
Proceedings Article | 26 May 2010 Paper
Inspecting EUV mask blanks with a 193-nm system
Proceedings Volume 7748, 774808 (2010) https://doi.org/10.1117/12.865490
KEYWORDS: Inspection, Extreme ultraviolet, Optical spheres, Quartz, Particles, Silica, Photomasks, Defect detection, Deep ultraviolet, Defect inspection
Proceedings Article | 20 March 2010 Paper
Inspecting EUV mask blanks with a 193nm system
Proceedings Volume 7636, 76360Z (2010) https://doi.org/10.1117/12.850825
KEYWORDS: Inspection, Extreme ultraviolet, Optical spheres, Particles, Quartz, Photomasks, Silica, Deep ultraviolet, Defect detection, Signal to noise ratio
Proceedings Article | 17 October 2008 Paper
Evaluating practical vs. theoretical inspection system capability with a new programmed defect test mask designed for 3X and 4X technology nodes
Joshua Glasser, Tim Pratt
Proceedings Volume 7122, 71221H (2008) https://doi.org/10.1117/12.801546
KEYWORDS: Inspection, Photomasks, Logic, Defect detection, Optical proximity correction, Detection and tracking algorithms, Sensors, Signal to noise ratio, Modulation, Dysprosium
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