Dr. Ju-Hyung Lee
Assistant Professor at Univ of Seoul
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 28 August 2003 Paper
Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X
KEYWORDS: Lithography, Logic, Scanners, Manufacturing, Scanning electron microscopy, Photomasks, Logic devices, Nanoimprint lithography, Semiconducting wafers, Phase shifts

Proceedings Article | 26 June 2003 Paper
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Quartz, Scanners, Manufacturing, Scanning electron microscopy, Photomasks, Nanoimprint lithography, Chlorine, Semiconducting wafers, Phase shifts

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Etching, Dry etching, Particles, Resistance, Inspection, Scanning electron microscopy, Critical dimension metrology, Line edge roughness, Vacuum ultraviolet

Proceedings Article | 27 December 2002 Paper
Proc. SPIE. 4889, 22nd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Surface plasmons, Quartz, Scanners, Manufacturing, Scanning electron microscopy, Photomasks, Nanoimprint lithography, Semiconducting wafers, Phase shifts

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