Judith Yep
at KLA Singapore
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2020 Paper
Shlomit Katz, Boaz Ophir, Udi Shusterman, Anna Golotsvan, Liran Yerushalmi, Efi Megged, Yoav Grauer, Jian Zhang, Alimei Shih, Shi-Ming Wei, Judith Yep, Fiona (Shuk Fan) Leung, Pek Beng Ong
Proceedings Volume 11325, 113252C (2020) https://doi.org/10.1117/12.2550747
KEYWORDS: Semiconducting wafers, Overlay metrology, Machine learning, Metrology, Data modeling, 3D modeling, Performance modeling

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