Mr. Juhyoung Moon Profile

Juhyoung Moon

at Dongbu HiTek Co Ltd

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Publications (2)

Proceedings Article | 7 March 2008 Paper

Investigation of mechanism of pattern deformation on TiN substrate and O2 plasma effect without BARC

Juhyoung Moon, Young-Je Yun, Taek-seung Yang, Kwangseon Choi, Jeahee Kim, Jaewon Han

Proceedings Volume 6924, 69244G (2008) https://doi.org/10.1117/12.773143

KEYWORDS: Oxygen, Photoresist materials, Head-mounted displays, Plasma treatment, Lithography, Tin, Etching, Metals, Statistical analysis, Plasma

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Proceedings Article | 20 March 2006 Paper

Flare effect of different shape of illumination apertures in 193-nm optical lithography system

Young-Je Yun, Ju-Hyung Moon, Haeng-Leem Jeon, Jea-Hee Kim, Keeho Kim

Proceedings Volume 6154, 615435 (2006) https://doi.org/10.1117/12.656999

KEYWORDS: Light scattering, Diffraction, Photomasks, Lithographic illumination, Optical lithography, Lithography, Critical dimension metrology, Light, Reflection, Photoresist processing

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