Dr. Jun-Fei Zheng
Staff Research at Intel Corp
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 14 June 2004 Paper
Proc. SPIE. 5356, Optoelectronic Integrated Circuits VI
KEYWORDS: Oxides, Etching, Polymers, Metals, Silicon, Diodes, Photomasks, Wet etching, Semiconducting wafers, Group III-V semiconductors

Proceedings Article | 14 September 2001 Paper
Proc. SPIE. 4346, Optical Microlithography XIV
KEYWORDS: Optical components, Lithography, Reticles, Silica, Pellicles, Modal analysis, Finite element methods, Aluminum, Velocity measurements, Adhesives

Proceedings Article | 22 January 2001 Paper
Proc. SPIE. 4186, 20th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Contamination, Silica, Etching, Dry etching, Lamps, Chromium, Xenon, Transmittance, Photomasks, Excimers

Proceedings Article | 22 January 2001 Paper
Proc. SPIE. 4186, 20th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Reticles, Sensors, Error analysis, Pellicles, Finite element methods, Photomasks, Aluminum, Analytical research, Adhesives

Proceedings Article | 22 January 2001 Paper
Proc. SPIE. 4186, 20th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Electron beam lithography, Electron beams, Optical lithography, Diffusion, Thermal effects, Photomasks, Picosecond phenomena, Spatial resolution, Critical dimension metrology, Temperature metrology

Showing 5 of 7 publications
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