Dr. Jun Akedo Profile

Dr. Jun Akedo

Group Leader at AIST

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Author

Publications (6)

Proceedings Article | 4 January 2006 Paper

Optical scanning devices based on PZT thick films formed by aerosol deposition method

Jae-Hyuk Park, Jun Akedo, Maxim Lebedev, Harumichi Sato

Proceedings Volume 6037, 60371S (2006) https://doi.org/10.1117/12.638489

KEYWORDS: Scanners, Mirrors, Ferroelectric materials, Optical scanning, Aerosols, Deposition processes, Metals, Microelectromechanical systems, Silicon, Mirror structures

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Proceedings Article | 6 December 2005 Paper

Fabry-Perot optical modulator fabricated by aerosol deposition

Masafumi Nakada, Keishi Ohashi, Hiroki Tsuda, Jun Akedo

Proceedings Volume 6050, 605004 (2005) https://doi.org/10.1117/12.648338

KEYWORDS: Optical modulators, Transmittance, Mirrors, Ferroelectric materials, Modulation, Aerosols, Electrodes, Light scattering, Multilayers, Dielectrics

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Proceedings Article | 13 November 2002 Paper

Fabrication of microfluidic device (diffuser or mixer) using aerosol deposition method

Jun Akedo, Maxim Lebedev

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.471922

KEYWORDS: Ferroelectric materials, Silicon, Particles, Liquids, Aerosols, Deposition processes, Microfluidics, Electrodes, Diffusers, Glasses

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Proceedings Article | 13 November 2002 Paper

Thick PZT film/stainless steel actuator fabricated by aerosol deposition method: fatigue property

Maxim Lebedev, Jun Akedo

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.471923

KEYWORDS: Actuators, Ferroelectric materials, Aerosols, Head, Magnetism, Deposition processes, Annealing, Microactuators, Magnetic tracking, Atmospheric particles

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Proceedings Article | 14 November 1997 Paper

Application of jet-printed PZT layers for actuation of small beams, membranes and a 2D scanning actuator

Andreas Schroth, Masaaki Ichiki, Ryutaro Maeda, Jun Akedo, Sohei Matsumoto

Proceedings Volume 3242, (1997) https://doi.org/10.1117/12.293545

KEYWORDS: Ferroelectric materials, Actuators, Electrodes, Scanners, Silicon, Printing, Microelectromechanical systems, Laser ablation, Anisotropic etching, Interferometers

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Proceedings Article | 14 November 1997 Paper

Characterization and application of jet-printed thin PZT layers for actuation of MEMS

Andreas Schroth, Masaaki Ichiki, Ryutaro Maeda, Jun Akedo

Proceedings Volume 3242, (1997) https://doi.org/10.1117/12.293560

KEYWORDS: Ferroelectric materials, Microelectromechanical systems, Annealing, Dielectrics, Actuators, Electrodes, Silicon, Temperature metrology, Deposition processes, Erbium

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Showing 5 of 6 publications

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