Dr. Jun Akedo
Group Leader at AIST
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 4 January 2006 Paper
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Microelectromechanical systems, Mirrors, Ferroelectric materials, Aerosols, Metals, Scanners, Silicon, Optical scanning, Deposition processes, Mirror structures

Proceedings Article | 6 December 2005 Paper
Proc. SPIE. 6050, Optomechatronic Micro/Nano Devices and Components
KEYWORDS: Mirrors, Multilayers, Ferroelectric materials, Modulation, Aerosols, Electrodes, Dielectrics, Light scattering, Transmittance, Optical modulators

Proceedings Article | 13 November 2002 Paper
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Ferroelectric materials, Microfluidics, Aerosols, Electrodes, Glasses, Particles, Silicon, Diffusers, Deposition processes, Liquids

Proceedings Article | 13 November 2002 Paper
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Actuators, Ferroelectric materials, Aerosols, Annealing, Magnetism, Microactuators, Head, Deposition processes, Atmospheric particles, Magnetic tracking

Proceedings Article | 14 November 1997 Paper
Proc. SPIE. 3242, Smart Electronics and MEMS
KEYWORDS: Microelectromechanical systems, Actuators, Ferroelectric materials, Electrodes, Annealing, Dielectrics, Silicon, Erbium, Deposition processes, Temperature metrology

Showing 5 of 6 publications
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